| 发明名称 |
ENCAPSULATED ACTIVE TRANSDUCER AND METHOD OF FABRICATING THE SAME |
| 摘要 |
A micro-electromechanical systems (MEMS) ultrasonic transducer device includes a substrate defining an opening and an active transducer having multiple of active layers stacked over the opening of the substrate. The active transducer is completely encapsulated by multiple passivation layers.
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| 申请公布号 |
US2011198970(A1) |
申请公布日期 |
2011.08.18 |
| 申请号 |
US20100706752 |
申请日期 |
2010.02.17 |
| 申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) |
发明人 |
MARTIN DAVID;BUCCAFUSCA OSVALDO |
| 分类号 |
H01L41/053;H01L41/22 |
主分类号 |
H01L41/053 |
| 代理机构 |
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