CONTAINER FOR RECEIVING PELLICLE

摘要

PURPOSE: A pellicle storage container is provided to prevent the insertion and the oscillation of a cleaning solution when a contact unit is fixed to the container by an organic solvent. CONSTITUTION: A pellicle storage container stores pellicles for the lithography. The pellicle storage container comprises a pellicle storage container main body(20) covered with a pellicle storage container cover body. One functional spare part selected from a handle, a fixing member(23) for the pellicles, or a reinforcing member(21) is installed on either the pellicle storage container main body and the pellicle storage container cover body.