DEPOSITION MASK, DEPOSITION APPARATUS, AND METHOD FOR FORMING THIN FILM

摘要

PURPOSE: A deposition mask, a deposition device and a thin film forming method are provided to improve the productivity of organic EL using a vacuum deposition method. CONSTITUTION: A deposition mask comprises an opening(11). The deposition mask is composed to deliver steam vapor to a pixel which forms a film on a substrate. The opening is installed in the pixel and makes the steam vapor pass through. A film is formed on the opening in several times of the distance between neighboring pixels.