| 发明名称 |
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE AND LIGHT BEAM IRRADIATION PROCESSING DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a photoelectric conversion device which can eliminate the adjustment of a substrate temperature and can realize a high production efficiency by highly accurate machining and to provide a light beam irradiation machining apparatus. <P>SOLUTION: The method for manufacturing a photoelectric conversion device includes applying a light beam at a position determined based on information containing temperature information and a preliminarily acquired strain information to machine a workpiece. The light beam irradiation machining apparatus includes a control part that can control a light beam oscillation part and a drive part so that a light beam can be applied to a position determined based on information including temperature information acquired by a temperature information acquisition part and internally stored strain information. <P>COPYRIGHT: (C)2011,JPO&INPIT |
| 申请公布号 |
JP2011156583(A) |
申请公布日期 |
2011.08.18 |
| 申请号 |
JP20100022182 |
申请日期 |
2010.02.03 |
| 申请人 |
SHARP CORP |
发明人 |
TACHIBANA SHINSUKE;SHIMADA TAKASHI;SHICHIJO YOICHI |
| 分类号 |
B23K26/00;B23K26/42;B23K101/42;H01L31/04;H01S3/00 |
主分类号 |
B23K26/00 |
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