SYSTEM AND METHOD FOR RECYCLING A GAS USED TO DEPOSIT A SEMICONDUCTOR LAYER,申请号EP20090832564-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR RECYCLING A GAS USED TO DEPOSIT A SEMICONDUCTOR LAYER
摘要
申请公布号	EP2356673(A2)	申请公布日期	2011.08.17
申请号	EP20090832564	申请日期	2009.12.10
申请人	THINSILICON CORPORATION	发明人	STEPHENS, JASON, M.;STIMSON, BRADLEY, O.;HUSSEN, GULEID, N.
分类号	H01L21/205;C23C16/44;C23C16/455;H01L21/02;H01L21/285	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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