HEATING APPARATUS AND METHOD THEREOF

摘要

PURPOSE: A thermal processing apparatus and a method thereof are provided to easily find the reason of the abnormal operation of the apparatus by continuously monitoring an overheating of a heating plate, a short-circuit of a hotwire, and a non-operation of temperature control unit. CONSTITUTION: A thermal processing apparatus comprises a heating plate(200), a temperature control unit(202), a monitoring unit(206), and a controller(204). The hot plate gives the heat. The temperature control unit controls the heating plate. The monitoring unit monitors the temperature control unit and heating plate. If the abnormal operation happens, the monitoring unit generates and outputs an alarm message. The controller activates a warning light(208) according to the alarm message.