发明名称 |
MULTILAYERED QUARTZ GLASS CRUCIBLE AND METHOD OF ITS PRODUCTION |
摘要 |
<p>Disclosed is a multilayer structured quartz glass crucible, for pulling up silicon single crystal, whose structure has at least three layers comprising: a translucent outer layer made of naturally occurring quartz glass and having a large number of pores, a translucent intermediate layer, made of synthetic quartz glass and having a large number of pores, and a transparent inner layer substantially free from pores and made of a synthetic quartz glass. Thermal convection within the silicon melt is suppressed by use of the quartz glass crucible, thereby preventing oscillation on the surface of the silicon melt. A method for producing the quartz glas crucible is also disclosed.</p> |
申请公布号 |
EP1290250(B1) |
申请公布日期 |
2011.08.17 |
申请号 |
EP20010943461 |
申请日期 |
2001.05.31 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG;SHIN-ETSU QUARTZ PRODUCTS CO., LTD. |
发明人 |
OHAMA, YASUO;MATSUI, HIROSHI |
分类号 |
C03B20/00;C30B15/10;C03B19/09;C30B35/00 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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