发明名称 Vapour deposition apparatus
摘要 <p>A vapor deposition arrangement comprises a pan (2) and a cover with linearly disposed bores. A seal-off device having linearly disposed openings is provided above the cover. Through the seal-off device, the bores of the cover can be closed or opened, with all bores being addressed simultaneously.</p>
申请公布号 EP1788112(B1) 申请公布日期 2011.08.17
申请号 EP20050023354 申请日期 2005.10.26
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 KLEMM, GUENTER
分类号 C23C14/04;C23C14/24;C23C14/56;H01G13/00 主分类号 C23C14/04
代理机构 代理人
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