,申请号JP20050184754-传众专利搜索

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发明名称
摘要
申请公布号	JP4747691(B2)	申请公布日期	2011.08.17
申请号	JP20050184754	申请日期	2005.06.24
申请人		发明人
分类号	H01L21/304;C23C16/02;C23C16/44	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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