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发明名称
PVD and CVD system
摘要
申请公布号
EP1746182(A3)
申请公布日期
2011.08.17
申请号
EP20050023285
申请日期
2005.10.25
申请人
APPLIED MATERIALS, INC.
发明人
TAKEHARA, TAKAKO;SUN, SHENG;WHITE, JOHN M.
分类号
C23C14/56;C23C16/54;H01L21/00
主分类号
C23C14/56
代理机构
代理人
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地址
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