| 摘要 |
PURPOSE: A fault test apparatus for vacuum panels is provided to effectively detect faulty vacuum panels without placing the vacuum panels in a chamber. CONSTITUTION: A fault test apparatus for vacuum panels comprises a chamber(10), a pump part(20), a laser part(30), and a controller(40). The chamber has an internal space in which a vacuum panel(P) can be placed and a chamber window(12) through which a laser beam can enter and leave. The pump part is connected to the chamber in order to lower the internal pressure of the chamber. The laser part includes light emitting and receiving parts for a laser beam. The laser part is installed outside the chamber window. The controller is connected to the laser part.
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