发明名称 Optical device with controllable deflection element for vibration compensation
摘要 An optical device, in particular a microscope (1), that includes a beam path in which is arranged at least one deflection element (5, 6a to 6f) for deflecting the beam path, at least one vibration sensor (34) being arranged in or on the optical device; at least one of the deflection elements (5, 6a to 6f) including a mirror having a controllably deformable mirror surface (50); and a control unit (32) being provided that, as a function of the output signal of the vibration sensor (34), applies control to the at least one deflection element (5, 6a to 6f) in order to adjust the mirror surface (50) in such a way that vibrations of the optical device are compensated for by a correspondingly opposite-phase adjustment of the mirror surface (50).
申请公布号 US8000008(B2) 申请公布日期 2011.08.16
申请号 US20080113237 申请日期 2008.05.01
申请人 LEICA INSTRUMENTS (SINGAPORE) PTE. LTD. 发明人 SANDER ULRICH
分类号 G02B27/64 主分类号 G02B27/64
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