发明名称 Methods of and apparatus for cleaning and conveying a substrate
摘要 Discs roll along an inclined track through a chamber to expose opposite disc sides for cleaning. Energized fluid directed against the opposite sides removes particles from the discs, the fluid and particles exiting the chamber. Stop pins control a time period for cleaning and transporting the discs by selectively blocking or releasing the discs. The discs are stopped at many sections of a transducer, the sections being tailored to provide various cleaning characteristics. Within the chamber, the chamber is configured to minimize particles that originate other than by being adhered to the disc at a time when the disc is introduced into the chamber. Internal chamber configuration also minimizes retention of particles so that particles removed from one disc do not linger in the chamber for possible transfer to a disc that is cleaned in the same chamber at a later time.
申请公布号 US7997289(B1) 申请公布日期 2011.08.16
申请号 US20070866396 申请日期 2007.10.02
申请人 XYRATEX TECHNOLOGY LIMITED 发明人 FROST DAVE;HARBISON SEAN;MEHMANDOUST YASSIN;FROCAPPA MIKE
分类号 B08B3/02 主分类号 B08B3/02
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