发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.
申请公布号 US7998839(B2) 申请公布日期 2011.08.16
申请号 US20100821703 申请日期 2010.06.23
申请人 RENESAS ELECTRONICS CORPORATION 发明人 CHIBAHARA HIROYUKI;ISHII ATSUSHI;IZUMI NAOKI;MATSUMOTO MASAHIRO
分类号 H01L21/46 主分类号 H01L21/46
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