发明名称 Semiconductor device
摘要 A semiconductor device includes a memory cell array area, a peripheral circuit area on a periphery of the memory cell array area, and a boundary area having a specific width between the memory cell array area and the peripheral circuit area, the memory cell array area including a cell area including nonvolatile semiconductor memory cells, linear wirings extending from inside of the cell area to an area outside the cell area, and lower layer wirings in a lower layer than the linear wirings in the boundary area and electrically connected to the linear wirings, and wiring widths of the lower layer wirings being larger than widths of the linear wirings, the peripheral circuit area including a patterns electrically connected to the linear wirings via the lower layer wirings, the boundary area failing to be provided with the linear wirings and a wiring in same layer as the linear wirings.
申请公布号 US7998812(B2) 申请公布日期 2011.08.16
申请号 US20100729273 申请日期 2010.03.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAKUMA MAKOTO;FUTATSUYAMA TAKUYA
分类号 H01L21/8244;G03F1/00;G03F1/68;G03F7/20;H01L21/027;H01L21/336;H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8244
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