| 发明名称 |
Method of manufacturing a TFT array panel |
| 摘要 |
Multi-layered wiring for a larger flat panel display is formed by depositing molybdenum on a substrate in presence of a precursor gas containing at least one oxygen, nitrogen and carbon to form a molybdenum layer. An aluminum layer is deposited on the molybdenum layer. Another metal layer may be formed on the aluminum layer. The molybdenum layer has a face-centered cubic (FCC) lattice structure with a preferred orientation of (111).
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| 申请公布号 |
US7998786(B2) |
申请公布日期 |
2011.08.16 |
| 申请号 |
US20090369839 |
申请日期 |
2009.02.12 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE JE-HUN;LEE JAE-KYEONG;JEONG CHANG-OH;CHO BEOM-SEOK |
| 分类号 |
G02F1/1343;H01L21/00;G02F1/1345;G02F1/136;G02F1/1368;G09F9/35;H01L21/027;H01L21/285;H01L21/3205;H01L21/336;H01L23/48;H01L23/52;H01L27/12;H01L29/423;H01L29/45;H01L29/49;H01L29/786 |
主分类号 |
G02F1/1343 |
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