发明名称 Image sensor and manufacturing method thereof
摘要 An image sensor can be formed of a first substrate having a readout circuitry, an interlayer dielectric, and lower lines, and a second substrate having a photodiode. The first substrate comprises a pixel portion and a peripheral portion. The readout circuitry is formed on the pixel portion. The interlayer dielectric is formed on the pixel portion and the peripheral portion. The lower lines pass through the interlayer dielectric to electrically connect with the readout circuitry and the peripheral portion. The photodiode is bonded to the first substrate and etched to correspond to the pixel portion. A transparent electrode is formed on the interlayer dielectric on which the photodiode is formed such that the transparent electrode can be connected with the photodiode and the lower line in the peripheral portion. A first passivation layer can be formed on the transparent electrode. In one embodiment, the first passivation layer includes a trench exposing a portion of the transparent electrode. Then, an upper line can be formed on the peripheral portion and in the trench to shield a lateral side of the photodiode.
申请公布号 US7999292(B2) 申请公布日期 2011.08.16
申请号 US20080204848 申请日期 2008.09.05
申请人 DONGBU HITEK CO., LTD. 发明人 HWANG JOON
分类号 H01L31/062;H01L27/146;H04N5/335;H04N5/369;H04N5/374 主分类号 H01L31/062
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