发明名称 Removal of a sheet from a production apparatus
摘要 A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.
申请公布号 US7998224(B2) 申请公布日期 2011.08.16
申请号 US20090580719 申请日期 2009.10.16
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 KELLERMAN PETER L.;CARLSON FREDERICK;SINCLAIR FRANK
分类号 B01J6/00 主分类号 B01J6/00
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