发明名称 Dynamic random access memory devices and electronic systems
摘要 The invention includes methods of utilizing compositions containing iridium and tantalum in semiconductor constructions, and includes semiconductor constructions comprising compositions containing iridium and tantalum. The compositions containing iridium and tantalum can be utilized as barrier materials, and in some aspects can be utilized as barriers to copper diffusion.
申请公布号 US7999330(B2) 申请公布日期 2011.08.16
申请号 US20050167011 申请日期 2005.06.24
申请人 MICRON TECHNOLOGY, INC. 发明人 HU YONGJUN JEFF
分类号 H01L21/8242 主分类号 H01L21/8242
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