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发明名称
VERSCHIEBUNGSVORRICHTUNG MIT PRÄZISIONSPOSITIONSMESSUNG
摘要
申请公布号
AT520057(T)
申请公布日期
2011.08.15
申请号
AT20080840508T
申请日期
2008.10.17
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
FRISSEN, PETRUS;KLAVER, RENATUS
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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