| 摘要 |
3 1 SYSTEM METHOD AND APPARATUS FOR DRY-IN, DRY-OUT, LOW DEFECT LASER DICING USING PROXIMITY TECHNOLOGY- TN A B" 1'11@ S ACYOFTHE DISCLOSURE 5 A SLIBSTR,-ILCL)ROCCSSITIL:S@,SIEIII INCLUDES @T FIRST. INOVABLESUIFIICETENSION GRADIENT D EX ICE, A DICING DEVICE AND ASYSTEM CONTRO II CR. THE FIRST. NIOVAH I C SURFACE TENSION GRADI EN I DEVICE IS CAPABLE OF SUPPORTING A HIRST PROCESS WITHIN A FIRST MENISCUS. THE FIRST MENISCUS BEING SUPPORTED BETWEEN THE FIRST SURFACE TENSION GRADIENT DEVICE AND IT FIRST SURFILICE OF THE I 0 SUBSTRATE. THE FIRST MOABLE SURFACE TENSION GRADIENT DEVICE CAPABLE OF BEING MOVED RELATIVE TO THE FIRST SINFACC OF THE SUBSTRATE. THE DICIN.- DEVICE IS ORIENTED TO A DESIRED DICING LOCATION. THE DESIRED DICING LOCATION BEING ENCOMPASSED BY THE MENISCUS. THE SYSTERN CONTROLLER IS COUPLED TO THE DICING DEVICE AND THE SURFACE TENSION GRADIENT DEVICE. THE SN .STERN CONTROLLER INCLUDES A PROCESS RECIPE. A INCIFICID FOR DICING A SUBSTRATE IS ALSO DESCRIBED. 1 5 CL ' AJ
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