| 摘要 |
PROBLEM TO BE SOLVED: To perform an accurate vibration test by offsetting vibration coupled to the test vibration in an active vibration isolation device having a function of applying the test vibration to a supporting object. SOLUTION: An actuator group is disposed so as to apply a control force to the supporting object in the respective directions of six degrees of freedoms, and vibration isolation feedback control is performed so as to generate the control force at least proportional to the speed in each direction of the degrees of freedom. This active vibration isolation device includes a vibration control section 3c that inserts a vibration signal for the test vibration into a vibration isolation feedback loop of the x-axis direction when the test vibration is applied in the x-axis direction, for example, and a coupled suppression control section 3d that adds a coupled suppression signal generated from the vibration signal to an operation amount of control of the coupling direction so as to cancel vibration that is coupled to the test vibration and appears in the other direction. COPYRIGHT: (C)2011,JPO&INPIT
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