| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample transfer device capable of inserting a sample to be observed and analyzed by irradiating a charged particle beam, into a charged particle beam apparatus, while a time exposed to the atmosphere is restrained to the minimum, and especially capable of working even in a case a working area in the vicinity of the device is restricted or a case a space for mounting a sample stand on a side entry type sample holder is narrow. SOLUTION: In the sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam, the sample transfer device includes an expansible hollow member capable of internally storing the sample holder where the sample is mounted, a fixing member for fixing the sample holder inside the expansible hollow member, and a sealing member for opening and closing an opening communicating with the inside of the expansible hollow member and used for passing the sample holder. COPYRIGHT: (C)2011,JPO&INPIT |
