| 摘要 |
PURPOSE: A processing unit for monitoring the inside and an apparatus for processing a substrate including the same are provided to easily monitor the inner situations of a treatment liquid supplying state, a substrate transferring state, and a substrate seating state in processing a substrate using processing liquid in a processing unit. CONSTITUTION: An apparatus for processing a substrate comprises a processing unit(200), a substrate transfer unit(202), a nozzle(210), and a light ramp(224). The substrate is accepted in a housing(204) which provides an inner processing space for a substrate processing. At least one side of the housing is made of a transparent material. One or more lighting devices are arranged in the housing. The inside illumination of the housing is enhanced for monitoring the inner structure of the housing in processing. A cylinder pipe, in which at least one light ramp and an exhaust hole is included, is fixed in both sides of the housing.
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