| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell capable of improving an yield of a semiconductor substrate by uniformly forming a texture on a principal surface of the semiconductor substrate, and to provide the solar cell. <P>SOLUTION: The method of manufacturing the solar cell includes a texture formation process S12 where the texture is formed on a plate semiconductor substrate 10 having a principal surface 12 and a side surface 17 by etching, and a process S2 where a semiconductor layer and an electrode are formed on the semiconductor substrate 10 on which the texture is formed. The process S12 is the manufacturing method of the solar cell where bubbling is performed when etching. In the process S12, etching is performed while rotating the semiconductor substrate 10 with a shaft perpendicular to the principal surface 12 as a rotary shaft. <P>COPYRIGHT: (C)2011,JPO&INPIT |
