发明名称 |
METHOD OF MANUFACTURING SEMICONDUCTOR CHIP WITH ADHESIVE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor chip an adhesive protrusion of which is sufficiently reduced, and to provide a method of manufacturing a semiconductor device using the same. <P>SOLUTION: The method of manufacturing the semiconductor chip with the adhesive includes: preparing a laminate having a plurality of semiconductor chips arranged at intervals and a positive photosensitive adhesive layer made of a positive photosensitive adhesive composition in this order on a pressure-sensitive sheet; irradiating the positive photosensitive adhesive layer with an energy beam from the side of the pressure-sensitive adhesive sheet of the laminate; and then bringing a developer into contact with the positive photosensitive adhesive layer to pattern the positive photosensitive adhesive layer to obtain the semiconductor chip with the adhesive. <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011155195(A) |
申请公布日期 |
2011.08.11 |
申请号 |
JP20100016800 |
申请日期 |
2010.01.28 |
申请人 |
HITACHI CHEM CO LTD |
发明人 |
KAWAMORI TAKASHI;HATAKEYAMA KEIICHI;MITSUKURA KAZUYUKI;MASUKO TAKASHI;KATOGI SHIGEKI |
分类号 |
H01L21/52;C09J11/06;C09J179/08;C09J201/00;C09J201/06;H01L21/301 |
主分类号 |
H01L21/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|