发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR CHIP WITH ADHESIVE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor chip an adhesive protrusion of which is sufficiently reduced, and to provide a method of manufacturing a semiconductor device using the same. <P>SOLUTION: The method of manufacturing the semiconductor chip with the adhesive includes: preparing a laminate having a plurality of semiconductor chips arranged at intervals and a positive photosensitive adhesive layer made of a positive photosensitive adhesive composition in this order on a pressure-sensitive sheet; irradiating the positive photosensitive adhesive layer with an energy beam from the side of the pressure-sensitive adhesive sheet of the laminate; and then bringing a developer into contact with the positive photosensitive adhesive layer to pattern the positive photosensitive adhesive layer to obtain the semiconductor chip with the adhesive. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011155195(A) 申请公布日期 2011.08.11
申请号 JP20100016800 申请日期 2010.01.28
申请人 HITACHI CHEM CO LTD 发明人 KAWAMORI TAKASHI;HATAKEYAMA KEIICHI;MITSUKURA KAZUYUKI;MASUKO TAKASHI;KATOGI SHIGEKI
分类号 H01L21/52;C09J11/06;C09J179/08;C09J201/00;C09J201/06;H01L21/301 主分类号 H01L21/52
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