| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that a GIC (Grazing-Incidence Collector) shell spider receives prolonged exposure to EUV radiation and other radiation by-products that heat the spider and potentially induce deformation to mirrors supported thereby and cause performance problems. <P>SOLUTION: A cooled spider 10 for grazing-incidence collectors includes an outer ring 20, an inner ring 50, and a plurality of spokes 80 that mechanically and fluidly connect the inner and outer rings 20, 50. Cooling channels in the outer and inner rings 20, 50 and in the spokes 80 define a general cooling-fluid flow path through the cooled spider 10. The general cooling-fluid flow path has input and output points located an angle of substantially 180 degrees apart. The cooling-fluid flow path diverges at the input point into two branch flow paths that flow in opposite directions through the cooled spider 10, and then converge at the output point. Input and output cooling-fluid manifolds 110A, 110B are fluidly connected to the outer ring 20 at the input and output points, and serve to flow cooling fluid over the cooling-fluid flow path. <P>COPYRIGHT: (C)2011,JPO&INPIT |
