| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for evaluation of substrate mounting equipment, capable of facilitating evaluation of a temperature adjustment function or the like of the substrate mounting equipment, depending on conditions or a situation to be evaluated, and to provide a substrate for evaluation used for the same. SOLUTION: The apparatus for evaluation of the substrate mounting equipment is provided for fixing a processed substrate placed on a mounting surface and for controlling the temperature thereof. The apparatus has an airtight chamber that can carry out depressurization, and allows the substrate mounting equipment to be installed, a substrate for evaluation which is mounted on the mounting surface instead of the processed substrate and includes a resistance heating body that carries out self heat generation, and a temperature measuring means that measures the temperature of the substrate for evaluation. COPYRIGHT: (C)2011,JPO&INPIT |
