| 摘要 |
PROBLEM TO BE SOLVED: To suppress an error involved in a change in a scanning condition of a laser beam. SOLUTION: An X-axis scanning means 22 and a Y-axis scanning means 23 drive an X scanning mirror 18 and a Y scanning mirror 19 according to a driving signal which is based on a predetermined condition to thereby perform scanning with a laser beam. Angle sensors 22b and 23b output a position signal corresponding to an irradiation position with the laser beam on a sample 13. In a state where intensity in the irradiation of the sample 13 with the laser beam is suppressed (including stop) to be lower than intensity in observation by a light transmittance varying means 16 for adjusting the irradiation of the sample 13 with the laser beam, the driving signal is supplied to the X-axis scanning means 22 and the Y-axis scanning means 23 to thereby preliminarily drive the X scanning mirror 18 and the Y scanning mirror 19, and the position signal is measured at the predetermined time, then a lag time from a delay time of the position signal predicted in advance relative to the driving signal is calculated. The invention is applied to, for example, the laser scanning microscope. COPYRIGHT: (C)2011,JPO&INPIT |
