SEMICONDUCTOR WAFER AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor wafer capable of performing the exact evaluation of impurity distribution under a gate without giving damage to a silicon substrate, and a method for manufacturing the same. SOLUTION: The semiconductor wafer has a dummy filling unit with a W-shaped cross-sectional shape in a monitor region established in a predetermined place on the semiconductor substrate which has no electrical connection with the other unit. COPYRIGHT: (C)2011,JPO&INPIT