| 摘要 |
The present invention relates to a multi-layered substrate structure comprising at least one carrier layer (11), a first layer (12), said carrier layer and first layer being in contact with each other, and at least one second layer with a chemical composition different from the first layer (13) said first and second layer being in contact with each other, the second layer forming apertures each having at least one in-plane dimension (W1) smaller than the diffraction limit, the diffraction limit being defined by a radiation wavelength of the excitation light. The invention further relates to the use and manufacturing process of such a substrate structure and a luminescence sensor.
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