发明名称 METHOD FOR SLICING A MULTIPLICITY OF WAFERS FROM A CRYSTAL COMPOSED OF SEMICONDUCTOR MATERIAL
摘要 A method for slicing a plurality of wafers from a crystal includes providing a crystal of semiconductor material having a longitudinal axis, a cross section and at least one pulling edge. The crystal is fixed on a table and guided through a wire gang defined by sawing wire so as to form the wafers. The guiding is provided by a relative movement between the table and the wire gang such that entry sawing or exit sawing using the sawing wire occurs in a vicinity of the at least one pulling edge of the crystal.
申请公布号 US2011192388(A1) 申请公布日期 2011.08.11
申请号 US201113009957 申请日期 2011.01.20
申请人 SILTRONIC AG 发明人 KAESER MAXIMILIAN;BLANK ALBERT
分类号 B28D5/04 主分类号 B28D5/04
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