| 摘要 |
PURPOSE: A substrate inspecting apparatus is provided to perform smooth inspection coping with measurement boards of various shapes using variable stopper varying a location of stopper according to a shape of a measurement board. CONSTITUTION: A substrate inspecting apparatus comprises a first rail, a second rail, a variable stopper, and a substrate inspection part. The variable stopper is combined with the first rail and fixes the measurement board on a measuring position. The substrate inspection part is installed on the top of the first rail and the second rail and inspects a measurement board. The variable stopper comprises a joint(210), a shaft fixing part(220), a shaft(230), and a stopper(240).
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