| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor equipped with excitation electrodes and a circuit for driving a single beam vibrating element and uses the single beam vibrating element as a force sensor element, and also to provide an accelerometer. SOLUTION: The acceleration sensor is equipped with a piezoelectric sensor 20, and a support substrate 4 for supporting the piezoelectric sensor. The piezoelectric sensor is equipped with: a piezoelectric sensor element 21 for generating an electric signal in accordance with a force applied in the direction of its detection axis 9; and first and second portions 22a, 22b to be fixed for supporting the piezoelectric sensor element on first and second supporting surfaces 5a, 7a of the support substrate. The support substrate is equipped with: a first substrate piece 5 for fixing the first portion to be fixed; a second substrate piece 7 on a movable side for fixing the second portion to be fixed; a hinge portion 8 for performing coupling the first and second substrate pieces 5 and 7; and wiring conductors for connecting the excitation electrodes formed in the piezoelectric sensor. Pad electrodes formed on the first and second portions to be fixed are connected via the wiring conductors 10 provided on the support substrate. COPYRIGHT: (C)2011,JPO&INPIT
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