发明名称 SOLID-STATE THIN FILM FORMING METHOD USING ELECTRON SOURCE ELECTRODE
摘要 <p>A solid-state thin film forming method uses an electron source electrode that emits ballistic electrons, quasi-ballistic electrons, or hot electrons from an electron emission surface having a predetermined shape into a liquid or a liquid phase material, immerses the electron source electrode in a solution containing solid element ions, and activates the electron source electrode, thereby forming a solid-state thin film on the electron emission surface of the electron source electrode. This can provide a new solid-state thin film forming method that simultaneously satisfies demands for a low energy consumption, a low environmental load, a very small size, and a large scale integrated array.</p>
申请公布号 WO2011096439(A1) 申请公布日期 2011.08.11
申请号 WO2011JP52157 申请日期 2011.02.02
申请人 NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY;KOSHIDA NOBUYOSHI;OHTA TOSHIYUKI 发明人 KOSHIDA NOBUYOSHI;OHTA TOSHIYUKI
分类号 C25D5/00 主分类号 C25D5/00
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