发明名称 TRANSFER SYSTEM AND TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To carry out transfer with efficiency improved in a transfer system for transferring a minute transfer pattern formed in a mold to a molded article. SOLUTION: The transfer system 1 has a position adjusting device 5 for adjusting the relative positions of the mold M and the molded article W in order to transfer the minute transfer pattern formed in the mold M to an exact position of the molded article W, a transfer device 7 for transferring the minute transfer pattern formed in the mold M by pressing the molded article W by the mold M with the relative position adjusted to the molded article W, and a releasing device 9 for separating the mold M and the molded article W which are adhered to each other after the transfer with the use of the transfer device 7 is carried out from each other. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011152675(A) 申请公布日期 2011.08.11
申请号 JP20100014513 申请日期 2010.01.26
申请人 TOSHIBA MACH CO LTD 发明人 KOKUBO MITSUNORI;ITANI SHINYA;SUGIURA HIROYOSHI;FUJIWARA SHIGERU;BABA TAKATO
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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