METHOD FOR EVALUATING ELECTROCHEMICAL MIGRATION, AND EVALUATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To evaluate the electrochemical migration produced between electrodes. SOLUTION: The impedance between the electrodes 2 is measured, and the electrochemical migration (ECM) is evaluated on the basis of an equivalent circuit model considering the charge movement of the anode and cathode of the electrodes 2. An ECM evaluation system 1 is constituted of a thermo-hygrostat 3 housing the electrodes 2 evaluated in ECM, a power supply device 4 for applying voltage across the electrodes 2, an impedance calculation means 5 for measuring the electric current flowing across the electrodes 2 and calculating the impedance between the electrodes 2 on the basis of the measured result, an evaluation means 6 for evaluating the ECM between the electrodes 2 on the basis of the calculation result of the impedance, and an imaging apparatus 7 for imaging the surfaces of the electrodes 2. COPYRIGHT: (C)2011,JPO&INPIT