| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a linear and rotary compound actuator system capable of controlling a rotational angle of a mover axis by closed loop control. <P>SOLUTION: The linear and rotary compound actuator system includes a shaft member 82 capable of linear movement in an axial direction and rotational movement around an axial line, a hollow rotor 88 that surrounds a shaft member 82, a stator 92 of a rotating motor that is formed with a space for storing the rotor 88 and rotates the rotor 88 around the axial line, direct-acting bearings 86, 87 that rotate with the rotor 88, transmits rotation of the rotor 88 of the rotating motor to the shaft member 82 and allows the shaft member 82 to perform linear movement, an angle measurement device 94 that measures a rotational angle of the rotor 88, and a driver for the rotating motor that controls the rotating motor so that the rotational angle of the rotor 88 of the rotating motor measured by the angle measurement device 94 matches a command value. By controlling the rotational angle of the rotor 88 of the rotating motor, the rotational angle of the shaft member 82 is controlled. <P>COPYRIGHT: (C)2011,JPO&INPIT |
