发明名称 PICKUP DEVICE OF PLATE-LIKE WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a pickup device applicable even to a plate-like workpiece formed of a material hardly reacting to magnetic force, and improved in separation capability of the plate-like workpiece from a laminated body. SOLUTION: This pickup device of a plate-like workpiece is used for separating and picking up the plate-like workpiece one-by-one from a workpiece laminated body formed by vertically laminating a plurality of plate-like workpieces by sucking and pulling the plate-like workpiece located at the upper end of the workpiece laminated body by a sucking member from the workpiece laminated body. The pickup device includes: a pressing member arranged on a side of the workpiece laminated body, and forming a space between the plate-like workpiece and an adjacent plate-like workpiece on its lower side by pressing an outer peripheral edge of the plate-like workpiece from the side; and an air spray member for spraying air toward the space. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011155136(A) 申请公布日期 2011.08.11
申请号 JP20100015597 申请日期 2010.01.27
申请人 DATE OKIYO 发明人 DATE OKIYO
分类号 H01L21/677;B65G49/07 主分类号 H01L21/677
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