| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical processing apparatus capable of performing ultraviolet irradiation processings, while suppressing temperature rise of a processing object, and to provide an optical processing method. <P>SOLUTION: The optical processing apparatus includes a housing having an ultraviolet transmission window, and an excimer lamp arranged in the housing, as well as, a gas circulation opening connected to a cooling gas supply mechanism or a cooling-gas intake mechanism around the ultraviolet transmission window. The excimer lamp includes a plate-like discharge vessel that is flat as a whole, a high-voltage-side electrode arranged on one surface of the discharge vessel, and a ground-side electrode arranged on the other surface of the discharge vessel, and the one surface of the discharge vessel arranged with the high-voltage-side electrode is, preferably, arranged so as to face the ultraviolet-transmission window. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
