| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing CNT wires at a high productivity in a high yield. SOLUTION: The method for manufacturing CNT wires includes a step to form a plurality of CNT's on a substrate having an Fe-Al layer on the surface, and a step to pull out part of the CNT's. The compositional ratio Fe/Al of the Fe-Al layer calculated based on fluorescent X-ray spectrometric measurement and the film thickness of the Fe-Al layer calculated based on fluorescent X-ray spectrometric measurement satisfy any of conditions 1, 2, and 3. Condition 1 is such that the compositional ratio Fe/Al is in the range of 0.52-0.75, and the film thickness of the Fe-Al layer is in the range of 4-7.9 nm. Condition 2 is such that the compositional ratio Fe/Al is in the range of 0.23-0.52, and the film thickness of the Fe-Al layer is in the range of 5.8-7.9 nm. Condition 3 is such that the compositional ratio Fe/Al is≤0.52, the film thickness of the Fe-Al layer is≤5.8 nm, and the film thickness of Fe is greater than 1.6 nm. COPYRIGHT: (C)2011,JPO&INPIT
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