| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing amount detection method which detects polishing amount of a working amount detection element (e.g. a magnetic head), without causing increase in the scale of a detection circuit, and to provide a working amount detection device and a workpiece. SOLUTION: The working amount detection method includes: a process of inputting an input signal to one terminal of a bridge circuit of a workpiece which includes the bridge circuit, having an element of an known impedance value and an element of unknown impedance value; a process which detects an output signal from another terminal of a position which counters the terminal of the position of the bridge circuit; and a process of computing the impedance value of the unknown element and the processing end point of the workpiece, based on the input signal, the output signal and the impedance value of the known element. COPYRIGHT: (C)2011,JPO&INPIT
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