发明名称 LOW-CONTAMINATION OPTICAL ARRANGEMENT
摘要 An optical arrangement has a plurality of optical elements capable of transmitting a beam. A partial housing is provided which extends from a surface of an optical element in the direction of the beam emanating from the optical element, or of the beam incident on the optical element, and whose shape is adapted to the shape of the beam. The partial housing is surrounded at least partially by a measurement structure which is mechanically decoupled therefrom. The measurement structure has at least one sensor.
申请公布号 US2011194091(A1) 申请公布日期 2011.08.11
申请号 US201113023840 申请日期 2011.02.09
申请人 CARL ZEISS SMT GMBH 发明人 KWAN YIM-BUN PATRICK;XALTER STEFAN
分类号 G03B27/54 主分类号 G03B27/54
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