发明名称 JIG FOR SEMICONDUCTOR ELEMENT TRANSFER AND METHOD OF TRANSFERRING SEMICONDUCTOR ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a jig for semiconductor element transfer capable of suppressing electric damage caused by static electricity to a semiconductor element. SOLUTION: The jig for semiconductor element transfer separates the semiconductor element 4 which includes a circuit element 6, an electrode pad 7 conductive with the circuit element 6, and an insulating member 8 covering the circuit element 6 so as to expose the electrode pad 7 on the main surface of the substrate 5 from a fixing tape 9. The jig for semiconductor element transfer includes a holding means 12 for sucking and holding the side of the semiconductor element 4 where the insulating member 8 is disposed, and the holding means 12 is formed using a static electricity diffusing material. The static electricity diffusing material forming the holding means 12 is a resin or ceramic. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011155135(A) 申请公布日期 2011.08.11
申请号 JP20100015590 申请日期 2010.01.27
申请人 CANON INC 发明人 IRI JUNICHIRO
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址