发明名称 TRENCH-BASED POWER SEMICONDUCTOR DEVICES WITH INCREASED BREAKDOWN VOLTAGE CHARACTERISTICS
摘要 In one general aspect, a semiconductor device can include at least a first device region and a second device region disposed at a surface of a semiconductor region where the second device region is adjacent to the first device region and spaced apart from the first device region. That semiconductor device can include a connection region disposed between the first device region and the second device region, and a trench extending into the semiconductor region and at least extending from the first device region, through the connection region, and to the second device region. The semiconductor device can include a dielectric layer lining opposing sidewalls of the trench, an electrode disposed in the trench, and a conductive trace disposed over a portion of the trench in the connection region and electrically coupled to a portion of the electrode disposed in the connection region.
申请公布号 KR20110091590(A) 申请公布日期 2011.08.11
申请号 KR20117015627 申请日期 2009.11.25
申请人 FAIRCHILD SEMICONDUCTOR CORPORATION 发明人 YEDINAK JOSEPH A.;PROBST DEAN E.;CHALLA ASHOK;CALAFUT DANIEL
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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