| 摘要 |
PURPOSE: A top-down vacuum evaporation source apparatus is provided to minimize heat loss generating in the vacuum evaporation source by inserting a heating element within a thermal radiation and source reflector and to reduce capacity of controller by reducing power loss, thereby reducing manufacture and maintenance costs of the apparatus. CONSTITUTION: A source material(11) is saved in a source crucible(12) and an entrance of the source crucible is opened to upstream. A thermal radiation and source reflector(13) is arranged in order to surround the entrance of the source crucible in the outside of the source crucible. A source crucible support portion(17) comprises one or more openings(20) and supports the lower part of the source crucible. Housing(19) is formed in the outside of the thermal radiation and source reflector and accepts the source crucible, the thermal radiation and source reflector, the heating element, and the source crucible support portion. The thermal radiation and source reflector which is heated by the heating element radiates thermal radiation line to the source crucible and heats the source material. The thermal radiation re-heats and reflects and re-vapors the emitted source material from the source crucible.
|
