| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a release film for manufacturing good molded articles and a mold using the film by achieving good mold releasability and improving repetition durability or the like of molding, especially to achieve very good mold releasability of the mold having unevenness in the order of nanometer (e.g., a mold for forming reflection prevention structure) compared with conventional release films, and to achieve excellent repetition durability. <P>SOLUTION: The release film is formed using a precious metal nitride, i.e. the nitride of platinum (Pt), palladium (Pd), gold (Au), rhodium (Rh), osmium (Os), ruthenium (Ru), iridium (Ir), rhenium (Re) or an alloy of them. Specifically platinum nitride (Pt-N) has an especially excellent effect. <P>COPYRIGHT: (C)2011,JPO&INPIT |
