| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer mirror, in particular a multilayer dispersion mirror. <P>SOLUTION: The multilayer mirror comprises a plurality of individual layers (2, 3) which are deposited onto a substrate (4), are arrayed via parallel plane interfaces (6) and have different properties, and plane front faces (5, 5') on the side of beam impact which is inclined relative to the interfaces (6) between the individual layers (2, 3) strikes. <P>COPYRIGHT: (C)2011,JPO&INPIT |
