Disclosed is a silicon wafer wherein a plurality of terraces are formed on the surface with steps which are formed of a monatomic layer. There is no slip line in the wafer.
申请公布号
WO2011096417(A1)
申请公布日期
2011.08.11
申请号
WO2011JP52107
申请日期
2011.02.02
申请人
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY;OHMI, TADAHIRO;TERAMOTO, AKINOBU;SUWA, TOMOYUKI
