发明名称 SEMICONDUCTOR DEVICES HAVING BIT LINE INTERCONNECTIONS WITH INCREASED WIDTH AND REDUCED DISTANCE FROM CORRESPONDING BIT LINE CONTACTS AND METHODS OF FABRICATING SUCH DEVICES
摘要 A semiconductor device has a bit line interconnection with a greater width and a reduced level on a bit line contact is provided, as are methods of fabricating such devices. These method includes forming a buried gate electrode to intersect an active region of a substrate. Source and drain regions are formed in the active region. A first conductive pattern is formed on the substrate. The first conductive pattern has a first conductive layer hole configured to expose the drain region. A second conductive pattern is formed in the first conductive layer hole to contact the drain region. A top surface of the second conductive pattern is at a lower level than a top surface of the first conductive pattern. A third conductive layer and a bit line capping layer are formed on the first conductive pattern and the second conductive pattern and patterned to form a third conductive pattern and a bit line capping pattern. The second conductive pattern, the third conductive pattern, and the bit line capping pattern, which are sequentially stacked on the drain region, constitute first bit line structures, and the first conductive pattern, the third conductive pattern, and the bit line capping pattern, which are sequentially stacked on the isolation region, constitute second bit line structures.
申请公布号 US2011195551(A1) 申请公布日期 2011.08.11
申请号 US20100962772 申请日期 2010.12.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM DAE-IK
分类号 H01L21/8239;H01L21/28;H01L21/336 主分类号 H01L21/8239
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